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高纯过滤器


高纯过滤器

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com,entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Filtration Technology

Controlling contamination in liquid, air and gas process streams enables more productive and technologically superior semiconductor, flat panel displays, data storage, photovoltaic, life sciences, lithium ion battery and other microelectronic manufacturing processes. Entegris provides filtration solutions based on a variety of media and membrane technologies using performance criteria as well as analytical services to detect contamination in technology environments and analyze/validate materials.

AMC Filtration

Solutions for chemical filtration of airborne molecular contamination (AMC)

Gas Diffuser

Sintered nickel technology with 0.003 µm filtration technology in integrated filters/diffusers

Gas Filtration

Nickel, stainless steel and Teflon® filtration technologies for high-purity gas applications


Liquid Filtration Products

Membrane and depth media filtration technologies for chemicals, water, solvents and photochemicals


CMP Slurry Filtration

Depth media filters for ceria, alumina and silica slurry































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